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G Series Viton Sealed 10 to 50,000 sccm Mass Flow Controllers

Overview

The G-Series GE50A digitally-controlled mass flow controller is viton sealed and features 0 to 5 VDC analog control. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the Nitrogen (N₂) calibration gas.

Please see GE50A Mass Flow Controllers on mks.com for additional configurations.

Full scale flow rates from 10 to 5,000 sccm
Viton seal material
Less than 750 millisecond settling time
Standard closed conductance leak rate of less than 0.1% of Full Scale

Products

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Compare	Model	Type	Full Scale Flow Range	Fitting Type	Flow Input Output Signal	Seal Material	Availability	Price	Brand
GE50A013101RMV020 Mass Flow Controller, 10 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 In Stock	GE50A013101RMV020 Mass Flow Controller, 10 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	10 sccm	4 VCR Male	0-5 VDC	Viton	In Stock	$2,031.00	MKS Instruments
GE50A013102RMV020 Mass Flow Controller, 100 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 In Stock	GE50A013102RMV020 Mass Flow Controller, 100 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	100 sccm	4 VCR Male	0-5 VDC	Viton	In Stock	$2,031.00	MKS Instruments
GE50A013102SMV020 Mass Flow Controller, 100 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Viton Seal $2,031.00 In Stock	GE50A013102SMV020 Mass Flow Controller, 100 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	100 sccm	0.25 in. Swagelok-style	0 - 5 VDC	Viton	In Stock	$2,031.00	MKS Instruments
GE50A013103RMV020 Mass Flow Controller, 1000 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 12 Weeks	GE50A013103RMV020 Mass Flow Controller, 1000 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	1000 sccm	4 VCR Male	0-5 VDC	Viton	12 Weeks	$2,031.00	MKS Instruments
GE50A013103SMV020 Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Viton Seal $2,031.00 In Stock	GE50A013103SMV020 Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	1000 sccm	0.25 in. Swagelok-style	0 - 5 VDC	Viton	In Stock	$2,031.00	MKS Instruments
GE50A013201RMV020 Mass Flow Controller, 20 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 17 Weeks	GE50A013201RMV020 Mass Flow Controller, 20 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	20 sccm	4 VCR Male	0-5 VDC	Viton	17 Weeks	$2,031.00	MKS Instruments
GE50A013202RMV020 Mass Flow Controller, 200 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 12 Weeks	GE50A013202RMV020 Mass Flow Controller, 200 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	200 sccm	4 VCR Male	0-5 VDC	Viton	12 Weeks	$2,031.00	MKS Instruments
GE50A013203RMV020 Mass Flow Controller, 2000 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 Contact Us	GE50A013203RMV020 Mass Flow Controller, 2000 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	2000 sccm	4 VCR Male	0-5 VDC	Viton	Contact Us	$2,031.00	MKS Instruments
GE50A013204RMV020 Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $2,031.00 12 Weeks	GE50A013204RMV020 Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	Mass Flow Controller	20000 sccm	4 VCR male	0 - 5 VDC	Viton	12 Weeks	$2,031.00	MKS Instruments
GE50A013204SMV020 Mass Flow Controller, 20,000 sccm, 0.25 in. Swagelok-style,0-5 VDC, DB15, Viton Seal $2,031.00 In Stock	GE50A013204SMV020 Mass Flow Controller, 20,000 sccm, 0.25 in. Swagelok-style,0-5 VDC, DB15, Viton Seal	Mass Flow Controller	20000 sccm	0.25 in. Swagelok-style	0 - 5 VDC	Viton	In Stock	$2,031.00	MKS Instruments

Showing 1 to 010 of 13 entries

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Specifications

Series

G Series
Type

Mass Flow Controller
Calibration Gas

Nitrogen (N₂)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

10 to 40 psid
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Fitting Type

Swagelok® 4 VCR® male
Control Range

2% to 100% of Full Scale
Flow Input Output Signal

0 to 5 VCD
Connector Type

15-pin Type "D" Male
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale

Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.02% of Reading/psi
Typical Settling Time

<750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature Range

10°C to 50°C
Storage Humidity

0 to 95% relative humidity, non-condensing
Storage Temperature Range

-20° to 80°C (-4° to 149° F)
External Leak Integrity

<1 x 10^-09 (scc/sec He)
Seal Material

Viton
Surface Finish

16µ inch average Ra
Weight

3 lbs (1.4 kg)
CE Certified

Yes

		Compare	Model	ranking	Drawings, CAD & Specs		Type	Full Scale Flow Range	Fitting Type	Flow Input Output Signal	Seal Material	Availability	Featured Item	Price		Brand

Product Comparison

G Series Viton Sealed 10 to 50,000 sccm Mass Flow Controllers

G Series Viton Sealed 10 to 50,000 sccm Mass Flow Controllers

Overview

Products

Specifications