Industrial PERC processing also requires a laser that can keep up with the high scan speeds demanded. For this, MKS has tested the Spectra-Physics Quasar 532-75 high-power hybrid-fiber laser with TimeShiftª programmable pulse technology. The laser offers both high power and high PRF along with short pulse widths below 5 ns. For thin film removal, shorter pulse durations have been shown to be more energy efficient compared to longer pulse durations. With the Quasar laser, the shortest pulse durations are generated at the highest operating frequencies, which is ideal for PERC processing. Less heating and reduced risk of thermal damage to the underlying c-Si lattice are additional benefits of short-pulse processing. Further throughput improvement is also possible via beam-splitting. When a Quasar laser is operated at 850 kHz PRF, corresponding to one wafer per second (WPS) throughput, the available pulse energy is approximately three times more than necessary. Therefore, a three-beam split can effectively triple the throughput of a single laser thus allowing for throughputs of three WPS. Irrespective of the final system configuration, the Quasar laser platform and its unique TimeShiftª pulse-tailoring technology has the power, speed, and flexibility to meet the demands of industrial PERC solar cell manufacturing.
One technology which shows promise of meeting the growing demands of solar panel quantity, performance and cost-effectiveness is TOPCon, or tunnel oxide passivated contact, technology. Incorporating some laser operations to the TOPCon process can further improve photovoltaic performance.
First, the LDSE process, which stands for "laser-doped selective emitters," creates a shallow, highly doped n++ emitter region by adding an n-type dopant to the wafer and then using a laser to both ablate the anti-reflective coating layer and drive the dopant into the underlying silicon. This would be performed before growing the tunneling silicon oxide layer. The benefits of LDSE include improved overall cell efficiency compared to standard methods such as furnace-based doping.