RGV direct drive high speed rotation stages can be used in applications like semiconductor wafer inspection, microrobotics, precision metrology and motion simulators, specifically for MEMS, gyros and accelerometer testing.
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Motorized Rotation Stage, High Speed, High Load, Brushless Direct, No Cable, XPS-D/RL
$24,772.00
8 Weeks
|
RGV160BL-S Motorized Rotation Stage, High Speed, High Load, Brushless Direct, No Cable, XPS-D/RL |
8 Weeks
|
$24,772.00 |
|
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Motorized Rotation Stage, High Speed, Brushless Direct, No Cable, XPS-D, XPS-RL
$8,690.00
6 Weeks
|
RGV100BL-S Motorized Rotation Stage, High Speed, Brushless Direct, No Cable, XPS-D, XPS-RL |
6 Weeks
|
$8,690.00 |
|
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High Precision & Torque Rotation Stage, 360°, Brushless, No Cable, XPS-D/RL
$10,116.00
8 Weeks
|
RGV100HL-S High Precision & Torque Rotation Stage, 360°, Brushless, No Cable, XPS-D/RL |
8 Weeks
|
$10,116.00 |
|
| Models |
RGV100HL-S |
RGV100BL-S |
Model: RGV160BL-SMotorized Rotation Stage, High Speed, High Load, Brushless Direct, No Cable, XPS-D/RL
$24,772.00
8 Weeks
Product Series Overview
|
|---|---|---|---|
| Angular Range | 360° | 360° | 360° |
| Maximum Speed | 720°/s | 720°/s | 1000°/s |
| Peak Motor Torque | 16 N·m | 2.7 N·m | 112 N·m |
| Minimum Incremental Motion | 0.10 mdeg | 0.10 mdeg | 0.04 mdeg |
| Centered Load Capacity | 100 N | 100 N | 2700 N |
| Bi-directional Repeatability, Typical | ±0.15 mdeg | ±0.15 mdeg | ±0.15 mdeg |
| Uni-directional Repeatability, Typical | ±0.10 mdeg | ±0.08 mdeg | ±0.05 mdeg |
| Uni-directional Repeatability, Guaranteed | ±0.15 mdeg | ±0.15 mdeg | ±0.15 mdeg |
| Accuracy, Typical | ±3.0 mdeg | ±3.0 mdeg | ±3.0 mdeg |
| Accuracy, Guaranteed | ±5.0 mdeg | ±5.0 mdeg | ±7.5mdeg |
| Wobble, Typical | ±7.0µrad | ±5.0 µrad | ±5.0µrad |
| Wobble, Guaranteed | ±20 µrad | ±10 µrad | ±10µrad |
| Eccentricity, Typical | ±1.0 µm | ±1.0 µm | ±0.8 µm |
| Eccentricity, Guaranteed | ±1.5 µm | ±1.5µm | ±2.0 µm |
| Inertia | 0.00123 kg·m2 | 0.00104 kg·m2 | 0.0241 kg·m2 |
| Limit Switches | Two optical limit switches at approx. ±168°, disabled by external switch | Two optical limit switches at approx. ±168°, disabled by external switch | Two optical limit switches at approx. ±168°, disabled by external switch |
| Origin | Optical, centered | Optical, centered | Optical, centered |
| Origin Repeatability | ±0.1 mdeg | ±0.1 mdeg | ±0.05 mdeg |
| Weight | 3.6 kg | 2.6 kg | 17.5 kg |
| MTBF | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) |
| Aperture Diameter | 30 mm | 30 mm | 110 mm |
With direct-drive technology, the RGV series offers superior speeds and enhanced positioning. A high efficiency, brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration. The non-contact direct-drive motor does not wear and introduces only minimal stage heating, with the temperature of the motor increasing by just 30°C at maximum continuous torque.
To ensure precision, the glass encoder is mounted on a ground reference surface. For example, the RGV160's 28,800 pt encoder allows for outstanding MIM. It is perfectly aligned with the stage’s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout.
A 30 mm or 110 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage.
The RGV series features a proprietary 4-point contact ball bearing and a 2-piece design which integrates multiple functions, like the bearing ways and the direct drive motor, minimizing the number of parts. The result is a more compact rotation stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications.
Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.
For critical positioning applications, Newport offers error mapping upon request for RGV series stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2 °C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.
Ultra-High Velocity