The 390411-0-YE-T Micro-Ion® ATM Vacuum Gauge Module features 1x10-9 Torr - Atmosphere pressure measurement, a size NW25 ISO-KF fitting, and analog output. A digital display for local pressure readings is included. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.
Absolute: 1.0 x 10-9 to 760 Torr Differential: -750 to +250 Torr
Analog Output
0.5-7.0 VDC (0.5 VDC per Decade Logarithmic) Optional Differential:1-5 VDC (-750 to +250 Torr Linear)
Communication Type
Analog
Accuracy
Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
Fitting Type
NW25 ISO-KF
Set Point Relays
0
Internal Volume
10.8 cm3 (0.65 in.3)
X-ray Limit
<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
Absolute: 1.0 x 10-9 to 760 Torr Differential: -750 to +250 Torr
Analog Output
0.5-7.0 VDC (0.5 VDC per Decade Logarithmic) Optional Differential:1-5 VDC (-750 to +250 Torr Linear)
Communication Type
Analog
Accuracy
Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
Fitting Type
NW25 ISO-KF
Set Point Relays
0
Internal Volume
10.8 cm3 (0.65 in.3)
X-ray Limit
<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
Additional CAD file downloads are not available for this product.
390411-0-YE-T - Drawings
Additional drawings are not available for this product.
390411-0-YE-T
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Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog