1. Products
  2. Motion Control
  3. Hexapods
  4. Hexapods
  5. Vacuum Compatible Hexapods
  6. HXP100V6-MECA

Hexapod, Vacuum Compatible, 200 mm Diameter Platform, 20 kg Load, M6
  • Type
    Vacuum Compatible
  • Size
    Ø300 x 209 mm
  • Centered Load Capacity
    200 N
  • Travel Range X, Y, Z
    ±27.5, ±25, ±14 mm
  • Travel Range ΘX, ΘY, ΘZ
    ±11.5, ±10.5, ±19 °
  • Minimum Incremental Motion X, Y, Z
    0.5, 0.5, 0.25 µm
  • Minimum Incremental Motion ΘX, ΘY, ΘZ
    0.25, 0.25, 0.5 mdeg
  • Uni-directional Repeatability X, Y, Z - Typical
    ±0.50, ±0.50, ±0.50 µm
  • Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
    ±0.25, ±0.25, ±0.50 mdeg
  • Maximum Speed X, Y, Z
    0.5, 0.5, 0.25 mm/s
  • Maximum Speed ΘX, ΘY, ΘZ
    0.2, 0.2, 0.4 °/s
  • Rigidity X, Y, Z
    5, 5, 40 N/µm
  • Bi-directional Repeatability (X,Y,Z), Typical
    ±2.5, ±2.5, ±1.5 µm
  • Bi-directional Repeatability (ΘX, ΘY, ΘZ), Typical
    ±1.25, ±1.25, ±2.5 mdeg
  • Connectors
    DB25 Male (6)
  • Cable Length
    1.5 m
  • Motor
    Stepper motor
  • Origin
    Optical, close to lower limit
  • Origin Repeatability
    X,Y,Z: ±5.0, ±5.0, ±2.5 µm
    U,V,W: ±2.5, ±2.5, ±5.0 mdeg
  • Encoder Resolution
    0.118405537 µm
  • Number of Axis
    6
  • Weight
    7.2 kg  
  • Vacuum Compatibility
    10-6 Torr
  • Thread Type
    M6
  • MTBF
    5,000 h (25% load, 10% duty cycle)
  • Compliance
    RoHS 3, CE
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