Newport’s new ZVR-PC is an integrated Z-vertical and DC Servo Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PC offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. Utilizing a DC Servo motor, and integrated rotary encoder in the theta stage, the ZVR-PC is capable of high speed, high performance positioning. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PC offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PC.
0.25 µm MIM for Z-axis when used with SMC100PP controller
ZVR-PC - Drawings & CAD
Additional CAD file downloads are not available for this product.
ZVR-PC - Drawings
Additional drawings are not available for this product.
ZVR-PC
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Wafer Positioning Stage, Integrated Vertical and DC Rotation Stage
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