The GTS30V is a compact, vertical stage that combines outstanding trajectory accuracy with fine adjustment capability of 0.1 μm Minimum Incremental Motion with a travel range of 30 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion. The GTS30V also does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS30V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 30 mm.
Direct Vertical Guiding
Crossed Roller Bearings
High-precision vertical motion is achieved using a direct vertical guiding system composed of matched pairs of anti-creep crossed roller bearings for the GTS30V and recirculating ball bearings for GTS70V. These linear guides were chosen to provide the straightest trajectory, smooth and precise motion and robust, long term operation. Additionally, the crossed roller bearings in GTS30V have the added advantage of more quiet, ripple-free motion, which is important in metrology level applications.
High Efficiency Drive Train
A folded DC motor with a precision ground, low-friction lead screw delivers ultra-smooth motion even at high loads. A reduction belt between the motor and the lead screw increases the available output torque and reduces servo sensitivity, ensuring 100 nm MIM.
Direct Position Feedback
Precision position feedback is supplied by a linear scale encoder, which contributes to sub-micron MIM and makes the GTS-V less susceptible to hysteresis. The direct read encoder system is impervious to position drift caused by motion-induced heating of the lead screw for improved accuracy and repeatability. For higher load applications, the GTS70VCC with a motor-mounted rotary encoder is recommended.
Plug and Play - ESP Compatible
All GTS-V stages are ESP-compatible. When connected to a Newport controller, they are quickly recognized and their operating parameters are configured without the need for user input. This Plug and Play feature is not only transparent to the user, but it also ensures the safe operation of the stage.
Manual Knob
The manual knob is convenient when the power is off and when quick and coarse adjustment is needed.
Multi-Axis Stage Assemblies
ILS250, GTS30V and URS100 stages for an XZ-Θz Assembly
When combined with Newport motorized linear and rotation stages, the GTS-V vertical stage is a space-saving alternative to traditional stacks of stages and provides unobstructed access to the payload from any side. Furthermore, centering the payload over the bearings ensures less cantilevering load effects and Abbe induced motion errors.
UZS80CCMotorized Vertical Stage, 4.5 mm Travel, DC Drive, 30 N Load, M4
UNIVERSAL
10 Weeks
$7,383.00
GTS30V - Drawings & CAD
Additional CAD file downloads are not available for this product.
GTS30V - Drawings
Additional drawings are not available for this product.
GTS30V
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Motorized Vertical Stage, High Precision, 30 mm Travel, GTS Series
Ultra-High Velocity Learn More
